Compensation method for the scale linearization of the high precision laser interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3820, Issue , 1999, Pages 144-153

  Cip, Ondrej ^a   Petru, Frantisek ^a  

^a INSTITUTE OF MATHEMATICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTATIONAL METHODS; LASER BEAMS; REFRACTOMETERS; WAVE EQUATIONS;

MICHELSON INTERFEROMETER; SINGLE-FREQUENCY LASER INTERFEROMETERS; SOLEIL-BABINET COMPENSATOR;

INTERFEROMETERS;

EID: 0032653508     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)