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Volumn 3680, Issue I, 1999, Pages 432-439
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Integrated multidisciplinary CAD/CAE environment for Micro-Electro-Mechanical Systems (MEMS)
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Author keywords
[No Author keywords available]
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Indexed keywords
BOUNDARY ELEMENT METHOD;
COMPACT DISKS;
COMPUTER AIDED DESIGN;
COMPUTER AIDED ENGINEERING;
DEFORMATION;
ELECTROSTATICS;
FINITE ELEMENT METHOD;
FINITE VOLUME METHOD;
FLUIDICS;
GRAPHICAL USER INTERFACES;
HEAT TRANSFER;
STRESS ANALYSIS;
MICROFLUIDICS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0032653403
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.341230 Document Type: Conference Paper |
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Times cited : (3)
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References (23)
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