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Volumn 42, Issue 9 SUPPL., 1999, Pages
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Novel pretreatment for thin-film measurements
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Author keywords
[No Author keywords available]
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Indexed keywords
ELLIPSOMETRY;
HYDROCARBONS;
MEASUREMENT ERRORS;
SILICON WAFERS;
THIN FILMS;
VOLATILE ORGANIC COMPOUNDS;
VOLATILE HYDROCARBONS;
SEMICONDUCTING FILMS;
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EID: 0032653218
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (4)
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References (6)
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