Optical materials and coatings at 157 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue I, 1999, Pages 342-345

  Bloomstein, T M ^a   Liberman, V ^a   Rothschild, M ^a   Hardy, D E ^a   Goodman, R B ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; FUSED SILICA; IMPURITIES; LIGHT ABSORPTION; MASKS; OPTICAL MATERIALS; SPECTROMETERS; SPECTROSCOPIC ANALYSIS; SUBSTRATES; SURFACE CLEANING;

OPTICAL PROJECTION SYSTEMS;

PHOTOLITHOGRAPHY;

EID: 0032653140     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351106     Document Type: Conference Paper

References (13)