Development of silicon microheaters for chemoresistive gas sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 964-968

  Brida, Sebastiano ^a   Ferrario, Lorenza ^a   Giacomozzi, Flavio ^a   Giusti, Domenico ^a   Guarnieri, Vittorio ^a   Margesin, Benno ^a   Pignatel, Giorgio U ^a   Soncini, Giovanni ^a   Vasiliev, Alexey ^a   Verzellesi, Giovanni ^a   Zen, Mario ^a  

^a ITC IRST   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC MATERIALS; FIBER OPTIC CHEMICAL SENSORS; FINITE ELEMENT METHOD; MICROMACHINING; SEMICONDUCTING SILICON;

CHEMORESISTIVE GAS SENSORS; DIELECTRIC STACKED MEMBRANES; EMBEDDED POLYSILICON RESISTOR HEATERS; SILICON MICROHEATERS;

INTEGRATED OPTOELECTRONICS;

EID: 0032652858     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341164     Document Type: Conference Paper

References (6)