Experimental study and computer simulation of AlN and BN sputtering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3687, Issue , 1999, Pages 268-273

  Elovikov, S S ^a   Zykova, E Yu ^a   Promokhov, A A ^a   Yurasova, V E ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; COMPUTER SIMULATION; CRYSTAL STRUCTURE; ELECTRON IRRADIATION; NITRIDES; POLYCRYSTALS; SPUTTERING; SURFACE STRUCTURE;

ALUMINUM NITRIDE; BORON NITRIDE; LOW ENERGY ELECTRON IRRADIATION;

ION BOMBARDMENT;

EID: 0032651970     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.347434     Document Type: Conference Paper

References (11)