Measurement of ECR-CH4 plasma using Langmuir probe and an optical emission spectroscopy

Shinku/Journal of the Vacuum Society of Japan

Volumn 42, Issue 5, 1999, Pages 565-571

  Inaba, Hiroshi ^a   Fujimaki, Shigehiko ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATION; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; METHANE; MICROWAVES;

LANGMUIR PROBE; OPTICAL EMISSION SPECTROSCOPY;

PLASMAS;

EID: 0032651871     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.42.565     Document Type: Article

References (14)

1. Fast Probe Data ACQUISITION AND ANALYSIS Software Manual, PMT (1992).
2. Huddlestone and Leonard: Plasma Diagnostic Techniques, ACADEMIC PRESS (1965).
3. H. Sugai and H. Toyoda: J. Vac. Sci. & Technol., A10 (1992) 1193.
4. Gogolides, Buteau, Rhallabi and Turban: J. Phys. D: Appl. Phys., 27 (1994) 818.