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Volumn 3676, Issue II, 1999, Pages 536-542
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Simulation of resist heating using TEMPTATION software with different models of electron beam energy deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
COMPUTER SOFTWARE;
ELECTRON SCATTERING;
MATHEMATICAL MODELS;
MONTE CARLO METHODS;
PHOTORESISTS;
THERMAL EFFECTS;
RESIST HEATING;
SOFTWARE PACKAGE TEMPTATION;
ELECTRON BEAM LITHOGRAPHY;
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EID: 0032651650
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.351126 Document Type: Conference Paper |
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Times cited : (2)
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References (8)
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