CD-SEM precision - improved procedure & analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 272-279

  Menaker, Mina ^a  

^a CD SEM Product Line   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CARBONIZATION; PRECISION ENGINEERING; SCANNING ELECTRON MICROSCOPY;

CRITICAL DIMENSION-SCANNING ELECTRON MICROSCOPES (CD-SEM); REPEATABILITY; REPRODUCIBILITY;

PHOTOLITHOGRAPHY;

EID: 0032651646     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350816     Document Type: Conference Paper

References (5)