Comparison of compound layer nucleation mechanisms in plasma nitriding and nitrocarburizing: the effect of CHn species

Journal of Materials Science

Volumn 34, Issue 5, 1999, Pages 1045-1049

  Li, Shi ^a,b   Manory, Rafael R ^a  

^a RMIT UNIVERSITY   (Australia)

^b No 07 02 San Centre   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBONITRIDING; CATHODES; COMPOSITION EFFECTS; HYDROCARBONS; IONS; IRON; IRON COMPOUNDS; NITRIDING; NITROGEN; NUCLEATION; PLASMA DIAGNOSTICS; SURFACE PROPERTIES;

ELASTIC RECOIL ANALYSIS; IRON NITRIDES; LIGHT ELEMENT DETECTION; PLASMA NITRIDING; THERMOCHEMICAL HEAT TREATMENT;

SEMICONDUCTOR PLASMAS;

EID: 0032651274     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004548112547     Document Type: Article

References (18)

1. R. R. MANORY, Mater. Manufact. Process 5 (1990) 445.
2. J. L. MARCHAND, H. MICHEL, M. GANTOIS and A. RICARD, in "Proceedings of the International Conference on Ion Nitriding" edited by T. Spalvins (ASM International, Cleveland, OH, 1986) pp. 53-60.
3. F. HOMBECK and T. BELL, Surf. Engng. 7 (1991) 45.
4. A. M. STAINES, Heat Treatment of Metals 4 (1990) 85.
5. B. EDENHOFER, Heat Treatment of Metals ibid. (1971) 23.
6. B. EDENHOFER, Heat Treatment of Metals Idem, ibid. 2 (1972) 59.
7. T. LAMPE, S. EISENBERG and G. LAUDIEN, Surf. Engng. 9 (1993) 69.
8. J. KÖLBEL, "Forschungsberichte des Landes Nordhein-Westfalen," Vol. 1555 (West-Deutscher verlag, Koln, 1965).
9. K. KELLER, Härt.-Tech. Mitte. 26 (1971) 120.
10. M. HUDIS, J. Appl. Phys. 44 (1973) 1489.
11. A. SZABO and H. WILHELMI, Plasma Chem. Plasma Process. 2 (1984) 89.
12. S. LI and R. R. MANORY, Metall. Mater. Trans. A 27 (1996) 135.
13. S. LI, R. R. MANORY and J. H. HENSLER, Surf. Coat. Technol. 71 (1995) 112.
14. J. C. BARBOUR and B. L. Doyle, in "Handbook of Modern Ion Beam Materials Analysis," edited by J. R. Tesmer and M. Nastasi (Materials Research Society, 1995) ch. 5.
15. A. R. STRIGANOV and N. S. SVENTISKII "Table of Spectral Lines of Neutral and Ionized Atoms" (IFI/Plenum Data Corporation, New York, 1968).
16. R. W. B. PEARSE and A. G. GAYDON "The Identification of Molecular Spectra," 3rd Ed (Chapman & Hall, London, 1965).
17. K. H. JACK, Proc. R. Soc. A 195 (1948) 41.
18. B. ENDENHOFER, J. G. CONYBEAR and G . T. LEGGE, Heat Treatment of Metals 1 (1991) 6.