Preparation of diamond-like carbon film with electron beam excited plasma (EBEP) source

Shinku/Journal of the Vacuum Society of Japan

Volumn 42, Issue 3, 1999, Pages 401-404

  Saito, Hironori ^a   Tada, Shigekazu ^a   Suzuki, Tsuyoshi ^a   Muto, Harunobu ^b   Hamagaki, Manabu ^c   Sakamoto, Yuichi ^a  

^a Nichimen Electron Technol Corp   (Japan)

^b Irie Koken Co Ltd   (Japan)

^c INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; ELECTRON BEAMS; GLASS; ION BOMBARDMENT; LUMINESCENCE; PLASMA APPLICATIONS; RAMAN SCATTERING; SUBSTRATES;

DIAMOND-LIKE CARBON FILMS; ELECTRON BEAM EXCITED PLASMA (EBEP);

AMORPHOUS FILMS;

EID: 0032650323     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.42.401     Document Type: Article

References (5)

1. JAPA
2. JAPA
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4. M. Yoshikawa, G. Katagiri, H. Ishida, A. Ishitani and T. Akamatsu: J. Appl. Phys., 64 (1988) 6464.
5. P. Koidl, C. Wild, R. Locher and R. E. Sah: Diamond and Diamond-Like Films and Coatings (R. E. Clausing et al.) (Plenum Press, New York, 1991) P243.