X-ray Lithography - a system integration effort

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue I, 1999, Pages 10-13

  Selzer, R ^a   Heaton, J ^a   Vladimirsky, Y ^a   Simon, K ^a  

^a SAL Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SYNCHROTRON RADIATION; TECHNOLOGY TRANSFER;

STEPPERS; X-RAY POINT SOURCE;

X RAY LITHOGRAPHY;

EID: 0032650224     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351164     Document Type: Conference Paper

References (7)