Two-dimensional simulation of electron cyclotron resonance plasma and comparison with experimental data

Thin Solid Films

Volumn 341, Issue 1, 1999, Pages 18-21

  Shin, Chee Burm ^a   Hur, Jin Seok ^a   Oh, Soo Ghee ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARRIER CONCENTRATION; ELECTRON CYCLOTRON RESONANCE; ELECTRONS; FINITE ELEMENT METHOD; FLOW OF FLUIDS; HEAT TRANSFER; PRESSURE; REACTION KINETICS; TEMPERATURE; VELOCITY;

ELECTRON CYCLOTRON RESONANCE PLASMA; ELECTRON TEMPERATURE; FLUID SIMULATION;

PLASMA SIMULATION;

EID: 0032649715     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01513-2     Document Type: Article

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