Microfabrication of biofactory-on-a-chip devices using laser ablation technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 572-580

  Talary, Mark S ^a   Burt, Julian P H ^a   Rizvi, Nadeem H ^a   Rumsby, Phil T ^a   Pethig, Ron ^a  

^a Electronics   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MATERIALS; BIOTECHNOLOGY; ELECTRIC FIELDS; EXCIMER LASERS; FABRICATION; FLUIDICS; LASER ABLATION; LSI CIRCUITS; MICROELECTRODES; MICROMACHINING; MULTILAYERS;

BIOFACTORY-ON-A-CHIP DEVICES; ELECTROKINETICS; MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032648852     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341248     Document Type: Conference Paper

References (12)