High performance diffractive optics for beam shaping

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3633, Issue , 1999, Pages 51-60

  Borek, Gregg T ^a   Brown, David R ^a  

^a MEMS Optical Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; HOLOGRAPHIC OPTICAL ELEMENTS; LITHOGRAPHY; MASKS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE STRUCTURE;

BEAM SHAPERS; BEAM SHAPING; FABRICATION ERRORS; GRAY SCALE MASK;

DIFFRACTIVE OPTICS;

EID: 0032648612     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)