Process integration of a-Si:H Schottky diode and thin film transistor for low-energy X-ray imaging applications

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 237-242

  Park, B ^a   Murthy, R V R ^a   Sazonov, A ^a   Nathan, A ^a   Chamberlain, S G ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ELECTRONS; HYDROGENATION; IMAGING TECHNIQUES; LEAKAGE CURRENTS; MASKS; MOLYBDENUM; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON; THIN FILM TRANSISTORS;

X RAY IMAGING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032648239     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)