Application of polysilanes for deep UV antireflective coating

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue I, 1999, Pages 205-212

  Onishi, Yasunobu ^a   Sato, Yasuhiko ^a   Shiobara, Eishi ^a   Miyoshi, Seiro ^a   Matsuyama, Hideto ^a   Abe, Junko ^a   Ichinose, Hideo ^a   Ohiwa, Tokuhisa ^a   Nakano, Yoshihiko ^a   Yoshikawa, Sawako ^a   Hayase, Shuzi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ETCHING; LIGHT REFLECTION; PHOTORESISTS; POLYSILANES; REFRACTIVE INDEX;

BOTTOM ANTIREFLECTIVE COATINGS (BARC); CRITICAL DIMENSION (CD) CONTROL;

ANTIREFLECTION COATINGS;

EID: 0032647922     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350203     Document Type: Conference Paper

References (8)