Preparation and optical transmittance of titanium hydride (deuteride) films by rf reactive sputtering

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 195-198

  Nakao, Setsuo ^a   Saitoh, Kazuo ^a   Hirahara, Tatsuya ^a   Ikeyama, Masami ^a   Tazawa, Masato ^a   Jin, Ping ^a   Niwa, Hiroaki ^a   Tanemura, Seita ^a   Miyagawa, Yoshiko ^a   Miyagawa, Soji ^a   Yasuda, Kyoichiro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Elastic recoil detection analysis spectra; Optical transmittance; rf Reactive sputtering; Rutherford backscattering spectrometry; Scanning electron microscopy micrographs; Titanium deutride films; Titanium hydride films; X ray diffraction

Indexed keywords

FILM PREPARATION; LIGHT ABSORPTION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TITANIUM COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

ELASTIC RECOIL DETECTION ANALYSIS SPECTRA; REACTIVE SPUTTERING; TITANIUM HYDRIDE FILMS;

OPTICAL FILMS;

EID: 0032647357     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01604-6     Document Type: Article

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