Selective oxidation of vanadium thin film surfaces using an atomic force microscope

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn , Issue , 1999, Pages 419-421

  Sakata, Seiji ^a   Vaccaro, Pablo O ^a   Yamaoka, Shinji ^a   Umezu, Ikurou ^a   Sugimura, Akira ^a  

^a ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; METALLIC FILMS; NANOTECHNOLOGY; OXIDATION; VANADIUM;

NANOOXIDATION PROCESSES;

THIN FILMS;

EID: 0032646905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)