Unstressed nickel chromium thin films for thermo-optic application

Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD

Volumn , Issue , 1999, Pages 411-414

  Di Mola, D ^a   Brioschi, L ^a   Carrera, A ^a   Fusari, F ^a   Lenzi, M ^a   Ongaro, G ^a  

^a Italtel SpA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

METALLIC FILMS; NICKEL ALLOYS; SILICA; SPUTTER DEPOSITION;

RADIO FREQUENCY BIASING;

THIN FILMS;

EID: 0032646847     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)