Surface roughness and subsurface damage characterization of fused silica substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3739, Issue , 1999, Pages 369-376

  Wuttig, Andreas ^a   Steinert, Joerg ^a   Duparre, Angela ^a   Truckenbrodt, Horst ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRACKS; INTERFEROMETRY; LIGHT SCATTERING; POLISHING; ROUGHNESS MEASUREMENT;

SUBSURFACE DAMAGE (SSD);

FUSED SILICA;

EID: 0032646651     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)