Opto-micro-mechanical superresolution detector system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3737, Issue , 1999, Pages 376-383

  Riesenberg, Rainer ^a   Seifert, Thomas ^a   Berka, Alexander ^a   Dillner, Ulrich ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

High resolution system; micro array; opto mechanical device; signal multiplexing; spatial light modulator

Indexed keywords

PIXELS; SIGNAL TO NOISE RATIO; ARRAYS; LIGHT MODULATORS; MICROOPTICS; MULTIPLEXING; OPTICAL RESOLVING POWER; SCANNING;

DIGITAL RESOLUTION; ENHANCED RESOLUTIONS; HIGH-RESOLUTION SYSTEMS; LATERAL RESOLUTION; MICROMACHINING TECHNOLOGIES; OPTOMECHANICAL; SIGNAL MULTIPLEXING; SPATIAL LIGHT MODULATORS;

LIGHT MODULATORS; PHOTODETECTORS;

MICRO-ARRAYS; OPTOMECHANICAL DEVICES;

EID: 0032646184     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.360031     Document Type: Conference Paper

References (11)

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5. R. Riesenberg, T. Seifert, "Design of spatial light modulator microdevices - micro slit arrays", Proceedings of SPIE, Vol. 3680, Part One, pp. 406-414, "Design, Test, and Microfabrication of MEMS and MOMS", 30 March -1 April 1999 Paris, France
6. R. Riesenberg, T. Seifert, J. Lonschinski, "Microspectrometer and microcomponents-achitectures with micro slitarrays and micro-mechanical detectorarrays", EOS Topical Meeting, Engelberg, Switzerland, 6-8.4.1998, oral presentation
7. R. Riesenberg, T. Seifert, J. SchOneich, "Slit array made by microsystem technology for performance-improvement of CCD-detectorarrays and mini-spectrometer-instruments", 2nd Round Table onMicrofNano Technologies for Space, 15-17 Oct. 1997, ESTEC, Noordwijk, The Netherland, Proceedings pp. 145-14
8. R. Riesenberg, W. Voigt, J. Schöneich, "Kompakt-Spektrofotometer mit Mikrosystemtechnik", Sensor 97, NUmberg, 13.-15. Mai 1997, Proceedings, Vol. 2, pp. 145-150
9. R. Riesenberg, T. Seifert, J. Schöneich, "Mikroaktuatorarray-Anordnung zur Verbesserung von Auflosung und SIR-Verhaltnis von CCD-Zeilen", Workshop über Technologieprojekte zur Unterst Utzung von Weltraum-Interferometrie-Missionen, Max-Planck-Institut für Astronomie, Heidelberg, 15.-16. April 1997
10. R. Riesenberg, J. Schoneich, "Future compact Spectrometer of microsystem technology", Pittcon '97, Atlanta, March 16-21, 1997, Proceedings p. 1059
11. R. Riesenberg, T. Seifert, H. Pawlik, "Future imaging compact spectrometers", Pittcon'99, March 7-12, 1999, Orlando, Proc. p.581