Double-sided sputtering deposition of YBa2Cu3O7.g thin films on 2 LaAlO3 wafers for microwave applications

IEEE Transactions on Applied Superconductivity

Volumn 9, Issue 2 PART 2, 1999, Pages 2363-2366

  Lemaitre Y ^a   Mansart, D ^a   Marcilhac, B ^a   Mage, J C ^a  

^a THALES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; FILM PREPARATION; LANTHANUM COMPOUNDS; PHYSICAL PROPERTIES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; STOICHIOMETRY; STRUCTURE (COMPOSITION); X RAY DIFFRACTION ANALYSIS; YTTRIUM BARIUM COPPER OXIDES; YTTRIUM COMPOUNDS;

ION CHANNELING; LANTHANUM ALUMINATE; SURFACE RESISTANCE VALUE;

SUPERCONDUCTING FILMS;

EID: 0032646069     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.784946     Document Type: Article

References (11)

1. see proceedings of ASC'96, Transact. Appl. Supercond., June 1997, vol. 7, N° 2, part 2.
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3. Y. Lemaître, D. Mansart, B. Marcilhac, J. Garcia-lopez, J. Siejka, J.C. Mage Evidence of a notch effect in microwave surface resistance versus deposition temperature for YBa,Cu,O;< thin film on MgO (100) substrate J. of Alloys and Compounds 251 (1997) 166-171.
4. J. M. Pond, K. R. Carroll, D. B. chrisey, J. S Horwitz, V. C. Cestone A novel microstrip-compatible technique for depositing YBCO on both surfaces of a substrate IEEE Trans. Appl. Super., vol.3, 1 (1993) 1711-1714.
5. J. C. Mage and D. Dieumegard High Tc superconductors for microwave filters AGARD Conference Proceedings N°481, Bath, 7th - 8th May 1990, pplO-1 to 10-8.
6. J. C. Mage, Final Technical Report of contract N° BREU 2.CT92.0295 SURF of European Project N° BE5764, pp. 74-75.
7. N. Klein, H. Chaloupka, G. Müller, S. Orbach, H. Fiel, B. Roas, L. Schultz, U. Klein, M Peiniger The effective microwave surface impedance of high Tc thin films J. Appl. Phys. 67, pp.6940-5 (1990)
8. J. Siejka, J. garcia-Lopez, Y. Lemaître Mechanism of oxygénation of YBCO thin films during in situ growth in presence of oxygen plasma : correlation between oxygénation and physical properties proceedings of SPIE, Bellingam, 1988, in press.
9. C. Zuccaro, N. Klein, A. G. Zaitzev, R. Wördenweber, Y. Lemaître, J. C Mage Nonlinear microwave losses of large area thin films proceedings of EUCAS'97, Institute of Physics Conference Series N°158, pp. 295-8.
10. S. Y. Xu, C. K. Ong, Y. L. Zhou, D. L. Low, L. F Chen, X. Zhang The effects of heating and annealing processes on the surface morphology and quality of double-sided YBCO thin films Physica C 297 (1998) 43-51.
11. B. Marcilhac, Y. Lemaître, D. Mansart, J.C. Mage Development of superconductive microwave filters for mobile communications and filter banks IEEE Trans, on Appl. Super., submitted.