New MOVPE process for InP based HBT's using CBr4, TBA and TBP in N2 ambient

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1999, Pages 555-558

  Keiper, D ^a   Eriksson, U ^a   Westphalen, R ^a   Landgren, G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; METALLORGANIC VAPOR PHASE EPITAXY; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH;

TERTIARYBUTYLPHOSPHINE;

HETEROJUNCTION BIPOLAR TRANSISTORS;

EID: 0032645474     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)