Active Micro Mirror: An new adaptive optical micro-component

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3749, Issue , 1999, Pages 54-55

  Robert, G ^a   Coville, A ^a   Babadjian, L ^a   Spirkovitch, S ^a  

^a ESIEE PARIS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; INTERFACES (COMPUTER); INTERFEROMETERS; MICROMACHINING; MIRRORS; OPTICAL SENSORS; PERTURBATION TECHNIQUES; POLYNOMIALS;

ADAPTIVE OPTICAL MICROCOMPONENTS; DEFORMABLE MICRO MIRRORS; MICHELSON INTERFEROMETERS; ZERNIKE POLYNOMIALS;

ADAPTIVE OPTICS;

EID: 0032644588     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)