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Volumn 349, Issue 1-2, 1999, Pages 254-259
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A study of physical properties and gas-surface interaction of vanadium oxide thin films
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Author keywords
Sensors; Sputtering; Surface composition; Vanadium oxide
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHEMICAL SENSORS;
FILM PREPARATION;
MAGNETRON SPUTTERING;
MORPHOLOGY;
PHYSICAL PROPERTIES;
VANADIUM COMPOUNDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
GAS-SURFACE INTERACTION;
VANADIUM OXIDE;
THIN FILMS;
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EID: 0032644284
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(99)00142-X Document Type: Article |
Times cited : (26)
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References (18)
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