Textures and structures of vapor deposits

Journal of Materials Science

Volumn 34, Issue 11, 1999, Pages 2575-2582

  Lee, D N ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; INTERFACIAL ENERGY; SURFACE TOPOGRAPHY; TEXTURES;

PHYSICAL VAPOR DEPOSITION (PVD);

CRYSTALLINE MATERIALS;

EID: 0032642881     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004696531491     Document Type: Article

References (29)

1. D. N. LEE, J. Mater. Sci. 24 (1989) 4375.
2. D. WALTON, Phil. Mag. (1962) 1671.
3. J.-H. JEONG, C.-H. CHOI and D. N. LEE, J. Mater. Sci. 31 (1996) 5811.
4. W. D. NIX, Metall. Trans. 20A (1989) 2217.
5. B. E. SUNDQUIST, Acta Metall. (1964) 1267.
6. G. MAH, P.S. MCLEOD and D. G. WILLIAMS, J. Vac. Sci. Technol. 11 (1974) 663.
7. P. K. DUTTA and H. WILMAN, J. Phys. D: Appl. Phy. 3 (1970) 389.
8. J. A. THORNTON, J. Vac. Sci. Technol. 11 (1974) 663.
9. K. P. RODBELL, D. B. KNORR and J. D. MIS, J. Electronic Mater. 22 (1993) 597.
10. H. ONODA, K. TOUCHI and K. HASHIMOTO, Jpn. J. Appl. Phys. 34 (1995) L1037.
11. K. KENNEDY, Trans. Inst. Vac. Met. Soc. AIME 242 (1968) 2251.
12. K. L. CHOPRA, "Thin Film Phenomena" (McGraw-Hill, New York, 1969) p. 220.
13. L. BERG, G. CZACK, E. KOCH and J. WAGNER, in "Gmelin Handbook of Inorganic Chemistry-Molybdenum Suppl. A 2a," edited by G. Czack, G. Kirschtein, D. Koschel, H. K. Kugler and P. Kuhn (Springer-Verlag, Berlin, 1985) p. 120.
14. J. M. SLAUGHTER, D. W. SCHULZE, C. R. HILLS, A. MIRONE, R. N. WATTS, C. TARRIO, T. B. LUCATORTO, M. KRUMREY, P. MUELLER and C. M. FALCO, J. Appl. Phys. 76 (1994) 2144.
15. J. H. SCOFIELD, A. DUDA, D. ALBIN, B. L. BALLARD and P. K. PREDECKI, Thin Solid Films 260 (1995) 26.
16. T. DRUSEDAU, F. KLABUNDE, M. LOHMANN and J. BLASING, Phys. Stat. Sol. (a), in press.
17. P. W. JANG, Ph.D. thesis, Seoul National University, Seoul, Korea, (1991).
18. D. N. LEE and Y. K. KIM, in Proc. 2nd Asian Metal Finish. Forum, Tokyo, June 1985, p. 130.
19. Idem., J. Metal Finishing Soc. Korea, 18 (1985) 95.
20. D. N. LEE, Advanced Metallization for Future ULSI, MRS Symposium Proc., Vol. 427 (1996) p. 168.
21. P. W. JANG, Y. H. KIM, T. D. LEE and T. KANG, J. Magnetics Soc. of Japan 13, Supplement No. S1 (1989) 685.
22. Idem., IEEE Trans. Magn. 25 (1989) 4618.
23. J. H. JE, D. Y. NOH, H. K. KIM and K. S. LIANG, J. Mater. Res. (1966), rapid communication.
24. J. PELLEG, L. Z. ZEVIN and S. LUNGO, Thin Solid Films 197 (1991) 117.
25. L. E. TOTH, "Transition Metal Carbides and Nitrides" (Academic Press, New York and London, 1971) p. 248
26. U. C. OH and J. H. JE, J. Appl. Phys. 74 (1993) 1692.
27. W. S. MIN, PhD thesis, Seoul National University, Seoul, Korea, (1995).
28. D. STULL and H. PROPHET, "JANAF Thermodynamical Tables," 2nd ed. (National Bureau of Standards, Washington, DC, 1971).
29. C. JIANG, T. GOTO and T. HIRAI, J. Mater. Sci. 29 (1994) 669.