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Volumn 61-62, Issue , 1999, Pages 221-224
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Reflection and transmission X-ray topographic study of a SiC crystal and epitaxial wafer
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Author keywords
Dislocation; Hollow core; SiC; X ray topography
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Indexed keywords
BURGERS VECTOR;
X RAY TOPOGRAPHY;
CRYSTAL ORIENTATION;
DISLOCATIONS (CRYSTALS);
ELECTROMAGNETIC WAVE REFLECTION;
ELECTROMAGNETIC WAVE TRANSMISSION;
EPITAXIAL GROWTH;
OPTICAL MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR GROWTH;
STRAIN;
VECTORS;
X RAY ANALYSIS;
SILICON CARBIDE;
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EID: 0032642676
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(98)00506-6 Document Type: Article |
Times cited : (10)
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References (3)
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