Selection of interferometric methods for silicon microelements testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3745, Issue , 1999, Pages 307-318

  Gorski, W ^a   Kujawinska, M ^a   Salbut, Z ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; STRAIN;

OPTICAL METROLOGY; SILICON MICROELEMENTS;

HOLOGRAPHIC INTERFEROMETRY;

EID: 0032642575     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)