Large area device quality indium-tin-oxide thin films by magnetron sputtering

Diffusion and Defect Data Pt.B: Solid State Phenomena

Volumn 67, Issue , 1999, Pages 255-259

  Thilakan, P ^a   Terzini, E ^a   Nobile, G ^a   Loreti, S ^a   Minarini, C ^a   Polichetti, T ^a   Sasikala, G ^a  

^a ENEA CR Portici   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CARRIER MOBILITY; CRYSTAL ORIENTATION; ENERGY GAP; FILM GROWTH; GLASS; HALL EFFECT; INDIUM COMPOUNDS; LIGHT ABSORPTION; MAGNETRON SPUTTERING; OXIDES; SPUTTER DEPOSITION;

INDIUM TIN OXIDE; TRANSPARENT CONDUCTING OXIDES (TCO);

CONDUCTIVE FILMS;

EID: 0032642185     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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