Measurement of semiconductor surface temperature using Raman spectroscopy

Furukawa Review

Volumn , Issue 18, 1999, Pages 73-77

  Yamaguchi, Takeharu ^a   Ohkubo, Michio ^a   Ikeda, Nariaki ^a   Nomura, Takehiko ^a  

^a Semiconductor R&D Cent

Author keywords

[No Author keywords available]

Indexed keywords

GATES (TRANSISTOR); MESFET DEVICES; RAMAN SPECTROSCOPY; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; TEMPERATURE DISTRIBUTION; TEMPERATURE MEASUREMENT; THERMAL EFFECTS;

SEMICONDUCTOR SURFACE MEASUREMENT;

SEMICONDUCTOR LASERS;

EID: 0032640218     PISSN: 09119280     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)