SCOPUS 정보 검색 플랫폼

Materials Chemistry and Physics

Volumn 60, Issue 1, 1999, Pages 44-49

Study on the deposition of diamond-like carbon films in a low pressure cathode arc plasma

(2) Yan, P X a Wu, X C a

a LANZHOU UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ARGON; CARBON; DEPOSITION; DISSOCIATION; HELIUM; MASS SPECTROMETRY; MECHANICAL PROPERTIES; METHANE; MORPHOLOGY; PLASMA APPLICATIONS; THIN FILMS;

CATHODE ARC PLASMAS; DIAMOND LIKE CARBON (DLC) FILMS;

AMORPHOUS FILMS;

EID: 0032640053 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/S0254-0584(99)00069-3 Document Type: Article

Times cited : (5)

References (15)

1
- 0015080715
- S. Aisenberg, R. Chabot, J. Appl. Phys. 42 (1971) 2953.
- (1971) J. Appl. Phys. , vol.42 , pp. 2953
- Aisenberg, S.¹ Chabot, R.²

2
- 21344496600
- D.L. Pappas, J. Hopwood, J. Vac. Sei. Technol. A12 (1994) 1576.
- (1994) J. Vac. Sei. Technol. , vol.A12 , pp. 1576
- Pappas, D.L.¹ Hopwood, J.²

3
- 0344571319
- J.J. Cuomo, J.P. Doyle, J. Brully, J.C. Liu, Appl. Phys. Lett. 58 (1991) 446.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 446
- Cuomo, J.J.¹ Doyle, J.P.² Brully, J.³ Liu, J.C.⁴

4
- 0021444902
- N. Savvides, J. Appl. Phys. 55 (1984) 4232.
- (1984) J. Appl. Phys. , vol.55 , pp. 4232
- Savvides, N.¹

5
- 0019575688
- C. Weissmantal, Thin Solid Films 92 (1982) 55.
- (1982) Thin Solid Films , vol.92 , pp. 55
- Weissmantal, C.¹

6
- 0345433431
- C.B. Collins, F. Davanloo, D.R. Jander, T.J. Lee, H. Park, J.H. You, J. Appl. Phys. 69 (1991) 862.
- (1991) J. Appl. Phys. , vol.69 , pp. 862
- Collins, C.B.¹ Davanloo, F.² Jander, D.R.³ Lee, T.J.⁴ Park, H.⁵ You, J.H.⁶

7
- 33847497132
- R.E. Shroder, R.J. Neinanich, J.J. Glass, Phys. Rev. B39 (1989) 12907.
- (1989) Phys. Rev. , vol.B39 , pp. 12907
- Shroder, R.E.¹ Neinanich, R.J.² Glass, J.J.³

8
- 0346974565
- P. Koidl, C. Wild, B. Dischler, J. Robertson, Prog. Solid St. Chem. 21 (1991) 199.
- (1991) Prog. Solid St. Chem. , vol.21 , pp. 199
- Koidl, P.¹ Wild, C.² Dischler, B.³ Robertson, J.⁴

9
- 0001122990
- R.J. Nemanich, S.A. Solia, Phys. Rev. B20 (1979) 393.
- (1979) Phys. Rev. , vol.B20 , pp. 393
- Nemanich, R.J.¹ Solia, S.A.²

10
- 0004811161
- E. Fitzer, F. Rozploch, High Temp. High Press. 20 (1988) 449.
- (1988) High Temp. High Press. , vol.20 , pp. 449
- Fitzer, E.¹ Rozploch, F.²

11
- 4244183989
- R.J. Nemanich, S.A. Sohin, Phys. Rev. B20 (1979) 392.
- (1979) Phys. Rev. , vol.B20 , pp. 392
- Nemanich, R.J.¹ Sohin, S.A.²

12
- 33847504293
- R. Lafonitaine, Materials Science Forum 52 & 53 (1989) 657.
- (1989) Materials Science Forum , vol.52-53 , pp. 657
- Lafonitaine, R.¹

13
- 84974183414
- M.F. Doerne, J. Mater. Res. 1 (1986) 601.
- (1986) J. Mater. Res. , vol.1 , pp. 601
- Doerne, M.F.¹

14
- 0000365782
- X. Jiang, J.W. Zou, K. Reichelt, P. Grunberg, J. Appl. Phys. 66 (1989)4729.
- (1989) J. Appl. Phys. , vol.66 , pp. 4729
- Jiang, X.¹ Zou, J.W.² Reichelt, K.³ Grunberg, P.⁴

15
- 0037527799
- V. Bohm, V. Buck, M. Liesenfeld, T. Naubert, J. Zeng, Diamond and Related Materials 4 (1994) 33.
- (1994) Diamond and Related Materials , vol.4 , pp. 33
- Bohm, V.¹ Buck, V.² Liesenfeld, M.³ Naubert, T.⁴ Zeng, J.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.