Surface micromachined multi-layer moving gate field effect transistor (MOGFET) pressure switch with integrated vacuum sealed cavity

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 499-504

  Kang, J W ^a   Simonette, K ^a  

^a HONEYWELL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTROSTATICS; GATES (TRANSISTOR); HYSTERESIS; MICROMACHINING; MULTILAYERS; PRESSURE; SEMICONDUCTOR DEVICE MANUFACTURE; VACUUM TECHNOLOGY;

MICROELECTROMECHANICAL PRESSURE SWITCHES; MOVING GATE FIELD EFFECT TRANSISTORS (MOGFET);

MICROELECTROMECHANICAL DEVICES;

EID: 0032639817     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746879     Document Type: Conference Paper

References (11)