Simple modeling and simulation of the squeeze film effect and transient response of the MEMS device

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 338-343

  Minami, Kazuyuki ^a   Matsunaga, Tadao ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; MICROMACHINING; SEMICONDUCTING SILICON;

SQUEEZE FILM EFFECTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032638145     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746851     Document Type: Conference Paper

References (6)