Microfabrication techniques for thick structure of metals and PZT

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 472-477

  Shimizu, T ^a   Murakoshi, Y ^a   Wang, Z ^a   Maeda, R ^a   Sano, T ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BINDERS; CERAMIC MATERIALS; COATING TECHNIQUES; FABRICATION; HYDROGELS; INJECTION MOLDING; LASER ABLATION; LEAD COMPOUNDS; MIM DEVICES; POLYVINYL ACETATES; POWDER METALS; SUPERCRITICAL FLUIDS;

CERAMIC-INSULATOR-METAL (CIM) STRUCTURES; LEAD CIRCONATE TITANATE; MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032637754     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)