'True' temperature measurements on microscopic semiconductor targets

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3700, Issue , 1999, Pages 245-249

  Albright, Grant C ^a   Stump, James A ^a   McDonald, John D ^a   Kaplan, Herbert ^a  

^a Quantum Focus Instruments Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

QUALITY CONTROL; SEMICONDUCTOR DEVICE TESTING; SEMICONDUCTOR DEVICES; SUBSTRATES; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

EMISSIVITY CORRECTION; MICROSCOPIC SEMICONDUCTOR TARGETS;

THERMOGRAPHY (IMAGING);

EID: 0032637544     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (0)