Miniature quadrupole arrays for residual and process gas analysis

Journal of the IEST

Volumn 42, Issue 1, 1999, Pages 27-31

  Boumsellek, S ^a   Ferran, R J ^a  

^a Ferran Scientific Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC SPACE CHARGE; GAS SENSING ELECTRODES; PRESSURE EFFECTS; RAY TRACING; SEMICONDUCTOR DEVICE MANUFACTURE;

RESIDUAL GAS ANALYZERS (RGA);

AIR FILTERS;

EID: 0032635674     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.42.1.p57381407j7677u0     Document Type: Article

References (2)