Dependence of the HfO2 thin film structure on the momentum transfer in ion beam assisted deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3578, Issue , 1999, Pages 154-161

  Scaglione, S ^a   Sarto, F ^a   Rizzo, A ^a   Alvisi, M ^a  

^a ENEA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY TRANSFER; FILM GROWTH; HAFNIUM COMPOUNDS; REFRACTIVE INDEX; SPUTTER DEPOSITION; THIN FILMS;

HAFNIA; ION BEAM ASSISTED DEPOSITION; MOMENTUM TRANSFER; SIGMUND MODEL;

OPTICAL FILMS;

EID: 0032635461     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.344450     Document Type: Conference Paper

References (16)