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Volumn 3710, Issue I, 1999, Pages 344-355
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Chemical detection based on adsorption-induced and photo-induced stresses in MEMS devices
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
CHEMICAL SENSORS;
HOLE TRAPS;
MICROELECTROMECHANICAL DEVICES;
ORDNANCE;
REAL TIME SYSTEMS;
RESONANCE;
TOXIC MATERIALS;
ADSORPTION-INDUCED STRESS;
BIMATERIAL BENDING;
ELECTRON-HOLE PAIRS;
PHOTO-INDUCED STRESSES;
SIGNAL DETECTION;
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EID: 0032634761
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (1)
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References (20)
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