Microstructure modification of amorphous carbon films by ion-implantation techniques

Journal of Materials Research

Volumn 14, Issue 5, 1999, Pages 2181-2190

  Wei, B ^a   Komvopoulos, K ^a   Brown, I G ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL MODIFICATION; DIAMOND FILMS; HYDROGENATION; ION IMPLANTATION; IRRADIATION; MECHANICAL VARIABLES MEASUREMENT; MICROSTRUCTURE; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SURFACE TOPOGRAPHY;

CARBIDE BOND FORMATION; CARBON FILMS; CHEMICAL REACTIVITY; MICROSTRUCTURE MODIFICATION;

AMORPHOUS FILMS;

EID: 0032634755     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0294     Document Type: Article

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