Switched current interface circuit for capacitive micromachined accelerometer

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn 1, Issue , 1999, Pages 458-463

  Rubio, C ^a   Ruiz, O ^a   Bota, S ^a   Samitier, J ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CAPACITANCE MEASUREMENT; CMOS INTEGRATED CIRCUITS; GLASS BONDING; MICROMACHINING; SILICON SENSORS;

CAPACITIVE MICROMACHINED ACCELEROMETERS; DELTA-SIGMA CONVERTERS; DIFFERENTIAL CAPACITANCE SENSORS;

MICROSENSORS;

EID: 0032634003     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)