Composition and thickness distribution of carbon overcoat films on thin film magnetic disks studied with surface reflectance analyzers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3619, Issue , 1999, Pages 27-34

  Vurens, G H ^a   Klein, D L ^a  

^a HDI Instrumentation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; ELLIPSOMETRY; LIGHT SCATTERING; MAGNETIC FILM STORAGE; SPUTTER DEPOSITION; SURFACE MEASUREMENT; THICKNESS MEASUREMENT;

OPTICAL SURFACE ANALYSIS; SURFACE REFLECTANCE ANALYSIS;

MAGNETIC DISK STORAGE;

EID: 0032633245     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)