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Volumn 3819, Issue , 1999, Pages 136-142
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Comparative investigations of bolometric properties of thin-film structures based on vanadium dioxide and amorphous hydrated silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC VARIABLES CONTROL;
AMORPHOUS SILICON;
BOLOMETERS;
LIGHT ABSORPTION;
MAGNETRON SPUTTERING;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
VANADIUM COMPOUNDS;
CONTACT NOISE REDUCTION;
EXCESS NOISE;
MAGNETRON ION PLASMA SPUTTERING;
MICROBOLOMETERS;
PLANAR STRUCTURE;
TEMPERATURE COEFFICIENT OF RESISTANCE;
THERMALLY SENSITIVE ELEMENT;
UNCOOLED ARRAY;
THIN FILMS;
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EID: 0032632811
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (8)
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References (12)
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