ONO and NO interpoly dielectric conduction mechanisms

Microelectronics Reliability

Volumn 39, Issue 2, 1999, Pages 235-239

  De Salvo, B ^a,b   Ghibaudo, G ^a   Pananakakis, G ^a   Reimbold, G ^b  

^a Grenoble INP Phelma   (France)

^b CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES OF SOLIDS; MATHEMATICAL MODELS; SILICA; SILICON NITRIDE;

INTERPOLY STACKED-DIELECTRIC CONDUCTION MECHANISMS;

DIELECTRIC MATERIALS;

EID: 0032632292     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00222-4     Document Type: Article

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