Multilevel imaging system realizing k1 = 0.3 lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3679, Issue I, 1999, Pages 396-407

  Suzuki, Akiyoshi ^a   Saitoh, Kenji ^a   Yoshii, Minoru ^a  

^a CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE ENHANCEMENT; LOGIC GATES; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY;

INNOVATIVE DOUBLE EXPOSURE BY ADVANCED LITHOGRAPHY (IDEAL);

IMAGING SYSTEMS;

EID: 0032632137     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354351     Document Type: Conference Paper

References (10)