Characterization of absorption and scatter losses on optical components for ArF excimer lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3578, Issue , 1999, Pages 614-624

  Mann, Klaus ^a   Apel, Oliver ^a   Eva, Eric ^a  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALCIUM COMPOUNDS; CALORIMETRY; COLOR CENTERS; EXCIMER LASERS; FUSED SILICA; LASER DAMAGE; LIGHT ABSORPTION; LIGHT MEASUREMENT; LIGHT SCATTERING; PHOTOLYSIS; PHOTONS; ULTRAVIOLET RADIATION;

CALCIUM FLUORIDE; COBLENTZ SPHERE; PHOTON ABSORPTION COEFFICIENTS;

OPTICAL DEVICES;

EID: 0032632048     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (17)