Preparation of a-Si:H and a-SiGe:H i-layers for nip solar cells at high deposition rates using a very high frequency technique

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 113-118

  Jones, S J ^a   Deng, X ^a   Liu, T ^a   Izu, M ^a  

^a Energy Conversion Devices Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON SOLAR CELLS;

VERY HIGH FREQUENCY (VHF) METHOD;

SILICON ALLOYS;

EID: 0032630869     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)