Cones formed during sputtering of InP and their use in defining AFM tip shapes

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 151-155

  Seah, M P ^a   Spencer, S J ^a   Cumpson, P J ^a   Johnstone, J E ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

AFM; AFM tip shape; Indium phosphide; Sputter cones; Topography

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON ENERGY LOSS SPECTROSCOPY; GROWTH (MATERIALS); OPTICAL RESOLVING POWER; SPUTTERING; SURFACE STRUCTURE; SURFACE TOPOGRAPHY; SURFACE TREATMENT;

SPUTTER CONES; SPUTTER DEPTH PROFILES; STRESS INDUCED DIFFUSION MECHANISM;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032630868     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00794-6     Document Type: Article

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