Understanding optical end of line metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 194-205

  Ziger, David ^a   Leroux, Pierre ^a  

^a VLSI Technology Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ERROR ANALYSIS; IMAGE QUALITY; INTEGRATED CIRCUIT MANUFACTURE; MEASUREMENT ERRORS; OPTICAL INSTRUMENT LENSES;

LINE SHORTENING MEASUREMENT; OPTICAL END OF LINE METROLOGY (OELM);

PHOTOLITHOGRAPHY;

EID: 0032630530     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350807     Document Type: Conference Paper

References (12)