Transparent conductive sol-gel thin films for photonic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3620, Issue , 1999, Pages 134-142

  Kololuoma, T ^a   Rantala, J T ^a   Vahakangas, J ^a   Laitinen, R S ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BOROSILICATE GLASS; CHEMICAL REACTIONS; COATING TECHNIQUES; ELECTRIC CONDUCTIVITY; INTEGRATED OPTICS; OPTICAL PROPERTIES; OPTICAL SENSORS; SEMICONDUCTOR DOPING; SEMICONDUCTOR MATERIALS; SOL-GELS; THIN FILMS; TIN COMPOUNDS;

ANTIMONY DOPED TIN DIOXIDE; PATTERNING; SPIN COATING PROCESS;

ANTIMONY COMPOUNDS;

EID: 0032630391     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.343723     Document Type: Conference Paper

References (22)